Micro-nano Systems Laboratory
- KEYWORDS
- MEMS/NEMS
- bio-nanotech
- energy harvester
Micro-nano Systems for biotechnology, nanotechnology and energy harvesting
In this laboratory, MEMS (micro electro mechanical system) design, fabrication and its application to nano and bio technologies as well as vibrational energy harvesters are investigated. We have genetically modified skin cells to detect early infection signals and to exhibit fluorescent signal upon detection. Research on nano science and engineering using MEMS devices covers the electro-mechano-thermal characterization of nano contacts in transmission electron microscope (TEM) for in situ atomic level observation of its shape and dimensions. MEMS electrostatic energy harvesters can generate as large as 1 mW from environmental vibrations.
MEMS tweezers have been developed for capturing, handling and characterizing DNA and other linear molecules.
Research staff
Ph.D., Professor
Micro-nano Mechatronics, Bio MEMS
Research activities
Overall topics
Living Sensor/Display on Skin for Infection Monitoring
Turn the living cells on the skin into sensors for physiological conditions, for example early infectious signal, and into displays visualizing the conditions. Features:
- ・Real-time direct monitoring is realized because no maintenance of sensors and no external power are required.
- ・For the mouse model, the device show clear fluorescent signal for a few day after stimulation (please seen the pictures).
- ・The living device can work over one year (life-long monitoring).
In-situ TEM observation using MEMS-in-TEM setup
Features
- ・Electrical, mechanical, thermal and biochemical properties of a nano object are measured simultaneously during TEM-atomic-level observation
- ・MEMS chips have multiple functionalities such mechanical stress application, thermal control, and liquid encapsulation.
- ・Monolithic silicon structure and electrostatic actuation enable very stable observation over hours
MEMS vibrational energy harvester
Features
- ・Electrical power as high as 1 mW generated from faint environmental vibration (~0.6G)
- ・Mass fabrication based on MEMS technology
- ・High conversion efficiency due to strong electret formation in a high-aspect-ratio gap
